10.15660/AUOFMTE.2020-2.3560
D.I. Țarcă, T. Costea, I. Moga
dan@tarca.ro
Volume XXIX, 2020/2
The paper describes the steps taken, starting with CAD representing the sputtering vacuum chamber for the manufacturer to start their production process, and finalising with automating the whole start/stop and reload sequence for the load-lock with an experimental setup made from readily available equipment in our laboratory, as the initial sequences were manually only and the risk of misusing for non-trained personnel would be high.
ISSN 1583-0691, CNCSIS "Clasa B+"