Development of a data acquisition system for a vacuum thin film deposition equipment
10.15660/AUOFMTE.2021-1.3584
R. V. Ghincu, D.I. Țarcă, O. A. Moldovan
remusghincu@yahoo.com
Volume XXX, 2021/1
Digital data acquisition is a must for precise data collection, and monitoring systems should be present on all modern equipment. This article focuses on improving the vacuum deposition systems already present in the SMARTMAT laboratory at the University of Oradea. Previous advancements have been made in installing vacuum chambers and digitally monitoring the vacuum level with the final objective of having a complete and versatile vacuum deposition system: magnetron sputtering, RF sputtering, and resistive heating. This article proposes a complex monitoring system based on modern sensors, data acquisition modules, and a processing and storage unit capable of monitoring all the vacuum deposition steps regarding the resistive heating system.
ISSN 1583-0691, CNCSIS "Clasa B+"