publicationethics.org

Designing and implementing an efficient chiller cooling solution for thin film deposition equipment and diffusion vacuum pump for thermal evaporation procedure

10.15660/AUOFMTE.2024-2.3698

R. V. Ghincu, D.I. Țarcă, T. O. Costea, T. Vesselenyi, D. Crăciun, P.D.Tocuț

remusghincu@yahoo.com

Volume XXXIII, 2024/2

This article focuses on improving the thermal evaporation vacuum deposition system already present in the SMARTMAT laboratory at the University of Oradea. The old cooling system was comprised of two inefficient pieces of equipment that were replaced by the system described in this paper. A new design for the piping and connectors was implemented.

efficient chiller cooling thin film deposition diffusion vacuum thermal evaporation

ISSN 1583-0691, CNCSIS "Clasa B+"